Accession Number : ADA262818


Title :   Specific Contact Resistance Measurements of Ohmic Contacts to Diamond


Descriptive Note : Conference paper


Corporate Author : NAVAL COMMAND CONTROL AND OCEAN SURVEILLANCE CENTER RDT AND E DIV SAN DIEGO CA


Personal Author(s) : Hewett, C A ; Zeidler, J R ; Taylor, M J ; Zeisse, C R ; Moazed, K L


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/a262818.pdf


Report Date : Jan 1991


Pagination or Media Count : 8


Abstract : We have demonstrated the applicability of the specific contact resistance measurement scheme of Reeves to semiconducting diamond. Four sample types were used: highly doped epitaxial films on 100 and 110 type IIa substrates; a type IIb diamond 0.25 mm thick, and a type IIb diamond 0.05 mm thick. Measured specific contact resistances ranged from 2 x 10(exp -5) to 1 x 10(exp -2) ohm-sq cm.... Electronic devices, Diamond technology, Semiconductors.


Descriptors :   *RESISTANCE , *DIAMONDS , *SEMICONDUCTORS , *ELECTRIC CONTACTS , ELECTRONICS , REPRINTS , EPITAXIAL GROWTH , SUBSTRATES , FILMS , MEASUREMENT , SYMPOSIA


Subject Categories : Physical Chemistry
      Electrical and Electronic Equipment
      Electricity and Magnetism


Distribution Statement : APPROVED FOR PUBLIC RELEASE