Accession Number : ADA262677


Title :   Field-Emitter Arrays for RF Vacuum Microelectronics


Descriptive Note : Quarterly rept. no. 5, 1 Oct-31 Dec 1992


Corporate Author : SRI INTERNATIONAL MENLO PARK CA


Personal Author(s) : Spindt, C A ; Rosengreen, A ; Schwoebel, P R


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/a262677.pdf


Report Date : Mar 1993


Pagination or Media Count : 39


Abstract : SRI International has completed the fifth quarter of a program to develop field-emitter arrays for vacuum microelectronics. The goals of the effort are 5 mA at 5 A/sq cm for at least 2 hours, and demonstrated modulation of the emission at 1 GHz. Low-capacitance cathodes were fabricated that produced 10 mA emission with an applied voltage of 130V, using a chemical vapor deposition process to produce SiO2 layers. One year of continuous 1000-tip cathode operation was achieved for a low-frequency emission test, significantly exceeding the program current density goal. Fabrication and assembly were completed for an apparatus required for microwave testing. In the program to optimize performance of field-emitter arrays, a series of plasma-cleaning experiments, involving hydrogen glow discharge, was performed.... Field-emitter array, Vacuum microelectronics, Low-capacitance cathode.


Descriptors :   *FABRICATION , *CATHODES , *EMITTERS , TEST AND EVALUATION , FREQUENCY , EMISSION , VOLTAGE , VAPOR DEPOSITION , MICROELECTRONICS , MODULATION , PHOTORESISTORS , CAPACITANCE , LOW FREQUENCY , RADIOFREQUENCY , GLOW DISCHARGES , HYDROGEN , MICROWAVES , CURRENT DENSITY , HIGH FREQUENCY , VACUUM , ARRAYS


Subject Categories : Electrical and Electronic Equipment
      Electricity and Magnetism


Distribution Statement : APPROVED FOR PUBLIC RELEASE