Accession Number : ADA261919


Title :   Ir-Zr Alloys as Diffusion Barriers between Cu and Si (100)


Descriptive Note : Technical rept.


Corporate Author : GEORGETOWN UNIV WASHINGTON DC DEPT OF CHEMISTRY


Personal Author(s) : Yang, H ; Gilmore, C M ; Ramaker, D E


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/a261919.pdf


Report Date : Dec 1993


Pagination or Media Count : 11


Abstract : Ir-Zr alloys were studied as diffusion barriers between Cu and Si with XRD, AES, RBS and resistivity measurements. An amorphous Ir 0.84 Zr alloy was found to be a better diffusion barrier than a polycrystalline ir 2.85 Zr alloy, with the amorphous alloy serving as a satisfactory diffusion barrier up to 800 deg C. The diffusion constants were determined at various temperatures, and the activation energy for Si out-diffusion in Cu/Ir 0.84 Zr/Si was obtained. ... Ir-Zr Alloys, Diffusion barriers.


Descriptors :   *COPPER , *SILICON , *BARRIERS , *DIFFUSION , *ZIRCONIUM ALLOYS , *IRIDIUM ALLOYS , MEASUREMENT , GRAIN BOUNDARIES , ACTIVATION ENERGY , POLYCRYSTALLINE , TEMPERATURE , CONSTANTS , ENERGY , FILMS


Subject Categories : Physical Chemistry
      Properties of Metals and Alloys
      Crystallography
      Thermodynamics


Distribution Statement : APPROVED FOR PUBLIC RELEASE