Accession Number : ADA261919
Title : Ir-Zr Alloys as Diffusion Barriers between Cu and Si (100)
Descriptive Note : Technical rept.
Corporate Author : GEORGETOWN UNIV WASHINGTON DC DEPT OF CHEMISTRY
Personal Author(s) : Yang, H ; Gilmore, C M ; Ramaker, D E
Report Date : Dec 1993
Pagination or Media Count : 11
Abstract : Ir-Zr alloys were studied as diffusion barriers between Cu and Si with XRD, AES, RBS and resistivity measurements. An amorphous Ir 0.84 Zr alloy was found to be a better diffusion barrier than a polycrystalline ir 2.85 Zr alloy, with the amorphous alloy serving as a satisfactory diffusion barrier up to 800 deg C. The diffusion constants were determined at various temperatures, and the activation energy for Si out-diffusion in Cu/Ir 0.84 Zr/Si was obtained. ... Ir-Zr Alloys, Diffusion barriers.
Descriptors : *COPPER , *SILICON , *BARRIERS , *DIFFUSION , *ZIRCONIUM ALLOYS , *IRIDIUM ALLOYS , MEASUREMENT , GRAIN BOUNDARIES , ACTIVATION ENERGY , POLYCRYSTALLINE , TEMPERATURE , CONSTANTS , ENERGY , FILMS
Subject Categories : Physical Chemistry
Properties of Metals and Alloys
Distribution Statement : APPROVED FOR PUBLIC RELEASE