Accession Number : ADA261685


Title :   Multivariable Control for Flexible IC Processing


Descriptive Note : Final annual rept. 1 Oct 1991-30 Sep 1992


Corporate Author : STANFORD UNIV CA DEPT OF ELECTRICAL ENGINEERING


Personal Author(s) : Kailath, Thomas


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/a261685.pdf


Report Date : 30 Nov 1992


Pagination or Media Count : 22


Abstract : The objective of this DARPA research project was to develop real-time control systems using in-situ sensors for semiconductor manufacturing. Our initial application was the development of a temperature control system for Rapid Thermal Processing (RTP) equipment. We developed mathematical models of RTP, analyzed them. identified and validated these models, deduced several control algorithms and finally applied them to real systems at Stanford University and at Texas Instruments. Also, based on our analysis, we modified the design of the system hardware (lamp array) and also proposed an optimal lamp array design technique.


Descriptors :   *CONTROL SYSTEMS , *SYSTEMS ENGINEERING , *PRODUCTION ENGINEERING , *SEMICONDUCTORS , *INTEGRATED CIRCUITS , MATHEMATICAL MODELS , TEMPERATURE CONTROL , TEXAS , MANUFACTURING , ARRAYS , REAL TIME , ALGORITHMS , TEMPERATURE


Subject Categories : Electrical and Electronic Equipment
      Mfg & Industrial Eng & Control of Product Sys


Distribution Statement : APPROVED FOR PUBLIC RELEASE