Accession Number : ADA261465
Title : Frequency Trimming Technique for Surface Acoustic Wave Devices
Descriptive Note : Technical rept.
Corporate Author : ARMY LAB COMMAND FORT MONMOUTH NJ ELECTRONICS TECHNOLOGY AND DEVICES LAB
Personal Author(s) : McGowan, Raymond ; Kosinski, John ; Himmel, Jeffrey ; Piekarz, Richard ; Lukaszek, Theodore
Report Date : Jun 1992
Pagination or Media Count : 38
Abstract : Currently, there is an in-house effort to produce a vibration- insensitive surface acoustic wave (SAW) resonator to stabilize the outputs of state-of-the-art SAW oscillators. One of the key elements in this investigation is the development of a simple, yet sensitive frequency trimming procedure to adjust the resonator frequency of a fabricated device. Background and procedural information for performing frequency trimming on a SAW resonator using a wet isotropic chemical etch are provided in this report. The results of this study revealed a trimming sensitivity of 0.33 ppm/A and 11.4% of performance degradation for a 10 kHz or 100 ppm shift in the resonant frequency of a device.
Descriptors : *ACOUSTIC WAVES , *ETCHING , *ACOUSTIC RESONATORS , OSCILLATORS , VIBRATION , WAFERS , ALUMINUM , RESONANT FREQUENCY , RADAR , SURFACE WAVES
Subject Categories : Electrooptical and Optoelectronic Devices
Distribution Statement : APPROVED FOR PUBLIC RELEASE