Accession Number : ADA260866


Title :   Diagnostics of Diamond Film Deposition Plasmas


Descriptive Note : Final rept. 19 Sep 1989-18 Sep 1992


Corporate Author : SRI INTERNATIONAL MENLO PARK CA


Personal Author(s) : Stalder, Kenneth R ; Jeffries, Jay B


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/a260866.pdf


Report Date : Nov 1992


Pagination or Media Count : 20


Abstract : Diagnostic methods were developed and applied toward understanding the gas phase processes occurring in diamond film deposition plasmas. Diagnostics were applied in plasma arcjet environments, hot filament systems and in radio frequency plasma systems. The diagnostic methods included optical emission spectroscopy, surface Raman spectroscopy, scanning electron microscopy, laser-induced fluorescence, and surface analysis by laser ionization. The parameters that were measured included radical concentrations and temperatures, ground-state and excited-state temperatures of C2 and CH molecules, electron temperatures and energy distribution functions, ion densities, and the observation of acetylene and other hydrocarbon species. Some modeling and comparison of experimental results to model predictions were also performed.... Diamond deposition plasmas, Diagnostics, Laser induced fluorescence, Optical emission spectroscopy, Mass spectroscopy, Langmuir probes.


Descriptors :   *PLASMAS(PHYSICS) , *DIAMONDS , *DEPOSITION , SCANNING , FREQUENCY , FUNCTIONS , DENSITY , OPTICS , TEMPERATURE , SURFACE ANALYSIS , RAMAN SPECTROSCOPY , ELECTRON MICROSCOPY , GASES , PHASE , CARBON , MASS SPECTROSCOPY , VAPOR DEPOSITION , THIN FILMS , ENERGY , COMPARISON , ACETYLENES , ION DENSITY , DISTRIBUTION FUNCTIONS , RADIOFREQUENCY , HEAT , LANGMUIR PROBES , EMISSION SPECTROSCOPY , GROUND STATE , FILAMENTS , IONIZATION , HYDROCARBONS , CHEMICAL REACTIONS , EXCITATION , ENVIRONMENTS , MODELS , SPECTROSCOPY , LASER INDUCED FLUORESCENCE , MOLECULES , PARAMETERS


Subject Categories : Physical Chemistry
      Atomic and Molecular Physics and Spectroscopy
      Optics
      Plasma Physics and Magnetohydrodynamics


Distribution Statement : APPROVED FOR PUBLIC RELEASE