Accession Number : ADA258856


Title :   A Two-Dimensional Particle Simulation of Parallel Plate Radio-Frequency (RF) Glow Discharges


Descriptive Note : Master's thesis


Corporate Author : AIR FORCE INST OF TECH WRIGHT-PATTERSON AFB OH SCHOOL OF ENGINEERING


Personal Author(s) : Bennett, Eric J


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/a258856.pdf


Report Date : 01 Dec 1992


Pagination or Media Count : 124


Abstract : A two-dimensional model of parallel plate RF glow discharges was developed to study discharge phenomena important in plasma assisted processing of materials. The particle-in-cell method is used to calculate the trajectories of computer particles under the influence of both self and applied fields. Monte Carlo methods using the null collision technique are used to model collisions between charged particles and neutral gas atoms. Results of computer experiments are presented with special emphasis placed on ion motion in the sheath regions. Experimental results show some qualitative agreement with one-dimensional model results. Further work required to gain quantitative agreement is outlined.


Descriptors :   *TWO DIMENSIONAL , *PARTICLES , *GLOW DISCHARGES , *RADIOFREQUENCY , FREQUENCY , SIMULATION , IONS , CELLS , PROCESSING , ONE DIMENSIONAL , THESES , CHARGED PARTICLES , COLLISIONS , TRAJECTORIES , WORK , RADIO EQUIPMENT , PLATES , GASES , REGIONS , MONTE CARLO METHOD , ATOMS , MOTION , PLASMAS(PHYSICS) , MATERIALS , MODELS , COMPUTERS , NEUTRAL


Subject Categories : Computer Systems
      Electricity and Magnetism
      Plasma Physics and Magnetohydrodynamics
      Radiofrequency Wave Propagation


Distribution Statement : APPROVED FOR PUBLIC RELEASE