Accession Number : ADA258830


Title :   Cation Production and Reactions Induced by Electron Impact on Tetraethoxysilane


Descriptive Note : Master's thesis


Corporate Author : AIR FORCE INST OF TECH WRIGHT-PATTERSON AFB OH SCHOOL OF ENGINEERING


Personal Author(s) : Holtgrave, Jeremy C


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/a258830.pdf


Report Date : Dec 1992


Pagination or Media Count : 100


Abstract : The production of cations by electron impact on tetraethoxysilane (TEOS) is studied with a Fourier Transform mass spectrometer (FTMS). The operating principles of FTMS are reviewed and the experimental,approach to the mass calibration and cross-section measurement is discussed. The cross-sections for total and partial ionization of Si(OC2H5) from threshold to 50 eV are measured. Also, the ion chemistry resulting from interactions between ions and neutral TEOS is examined.


Descriptors :   *CATIONS , *ELECTRON IMPACT SPECTRA , IONS , MEASUREMENT , PRODUCTION , IMPACT , INTERACTIONS , SILICON , CROSS SECTIONS , MASS SPECTROMETRY , SPECTROMETERS , MASS SPECTROMETERS , CALIBRATION , IONIZATION , SILANES , CHEMICAL REACTIONS , NEUTRAL , MASS , THESES , SPECTROMETRY , CHEMISTRY , ELECTRONS


Subject Categories : Organic Chemistry
      Physical Chemistry
      Atomic and Molecular Physics and Spectroscopy


Distribution Statement : APPROVED FOR PUBLIC RELEASE