Accession Number : ADA258211
Title : Field-Emitter Arrays for RF Vacuum Microelectronics.
Descriptive Note : Quarterly rept. no. 4, 1 Jul-30 Sep 1992
Corporate Author : SRI INTERNATIONAL MENLO PARK CA
Personal Author(s) : Spindt, C A ; Rosengreen, A ; Schwoebel, P R
Report Date : Nov 1992
Pagination or Media Count : 39
Abstract : SRI International has completed the fourth quarter of a program to develop field-emitter arrays for vacuum microelectronics. The goals of the effort are 5 mA at 5 A/cm2 for at least 2 hours, and demonstrated modulation of the emission at 1 GHz. In-house technology was defined for the fabrication of low-frequency cathode structures on glass substrates. Fabrication and assembly of the apparatus required for microwave testing of the high-frequency cathode geometry was completed. Very-low-voltage cathode operation was demonstrated by fabricating cathode arrays using an experimental technique to produce gate apertures with 0.5-micrometer diameters. Current/voltage tests of high-frequency cathodes qualified them for testing in a microwave testing apparatus. A field-emission microscope was fabricated and assembled for use in basic surface studies with the potential of developing cathode processing techniques that will maximize emission stability and uniformity over an array. In bright light source research, 76,000 footlamberts was demonstrated with a standard P-53 phosphor and standard Spindt-type emitter array.
Descriptors : *CATHODES , *FIELD EMISSION , *MICROELECTRONICS , *PHOSPHORS , *EMITTERS , TEST AND EVALUATION , FREQUENCY , EMISSION , DIAMETERS , STABILITY , OPERATION , MICROMETERS , CAPACITANCE , LOW VOLTAGE , LOW FREQUENCY , APERTURES , MODULATION , ASSEMBLY , LIGHT SOURCES , HIGH FREQUENCY , PROCESSING , VACUUM , ARRAYS , FABRICATION , MICROWAVES
Subject Categories : Radiation and Nuclear Chemistry
Electrical and Electronic Equipment
Distribution Statement : APPROVED FOR PUBLIC RELEASE