Accession Number : ADA256487
Title : SAW Chemosensor. Third Progress Report (SAW Chemosensor. De derde Voortgangsrapportage)
Descriptive Note : Final rept.
Corporate Author : PRINS MAURITS LABORATORIUM TNO RIJSWIJK(NETHERLANDS)
Personal Author(s) : Nieuwenhuizen, M S
Report Date : Feb 1992
Pagination or Media Count : 57
Abstract : At the Prins Maurits Laboratory TNO, work on surface acoustic wave (SAW) chemical sensors is being performed. Up to now the main subjects have been: implementation of SAW technology on a silicon chip, the development of a SAW sensor for NO2 and the development of a SAW sensor for chemical warfare agents. This third progress report deals with the on-going work on a SAW sensor for NO2 including immobilization of the chemical interface, silicon-based SAW sensors for NO2 with and without the application of silicon nitride passivation layers, preliminary results of the development of a SAW sensor for CO2 and a chapter dealing with an automated SAW testing system developed at TNO-PML. Most of the chapters have been published in the literature.
Descriptors : *CHEMICAL AGENT DETECTORS , *SURFACE ACOUSTIC WAVE DEVICES , AUTOMATION , NETHERLANDS , CARBON DIOXIDE , NITROUS OXIDE , SILICON NITRIDES
Subject Categories : Line, Surface and Bulk Acoustic Wave Devices
Chemical, Biological and Radiological Warfare
Distribution Statement : APPROVED FOR PUBLIC RELEASE