Accession Number : ADA255980


Title :   Advanced Laser Chemical Processing For Microelectronics and Integrated Optics


Descriptive Note : Final rept. 15 Jun 1989-15 Jun 1992,


Corporate Author : COLUMBIA UNIV NEW YORK MICROELECTRONICS SCIENCE LAB


Personal Author(s) : Osgood, Jr , Richard M ; Scarmozzino, Robert


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/a255980.pdf


Report Date : 15 Aug 1992


Pagination or Media Count : 23


Abstract : This report summarizes a three-year research effort to explore advanced laser-chemical processing for microelectronics and integrated optics. The main goals of the work have been: (a) to develop techniques for fabrication of integrated optical devices in GaAs multilayer and quantum well structures, and (b) to explore new and novel techniques of advanced semiconductor processing for microelectronics and optoelectronics.


Descriptors :   *ELECTROOPTICS , *INDIUM PHOSPHIDES , OPTICS , CHEMICALS , MODIFICATION , PROCESSING , STRUCTURES , FABRICATION , SEMICONDUCTORS , LASERS , ETCHING , SURFACES , ANISOTROPY , MICROELECTRONICS , CADMIUM , WORK


Subject Categories : Electrical and Electronic Equipment
      Mfg & Industrial Eng & Control of Product Sys
      Optics
      Quantum Theory and Relativity
      Solid State Physics


Distribution Statement : APPROVED FOR PUBLIC RELEASE