Accession Number : ADA255977


Title :   Organization of Workshop on Emerging Technologies for In-Situ Processing


Descriptive Note : Final rept. 15 Mar-31 Aug 1992,


Corporate Author : MASSACHUSETTS INST OF TECH CAMBRIDGE RESEARCH LAB OF ELECTRONICS


Personal Author(s) : Melngailis, John


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/a255977.pdf


Report Date : 31 Aug 1992


Pagination or Media Count : 67


Abstract : The goal of the workshop was to bring together government, industrial and university representatives to assess the progress and future direction of in situ processing of semiconductors. Since the first NATO Workshop in this topic area (Cargese, Corsica in 1987) there has been surprising progress toward the industrial applications, particularly as exemplified by cluster tools and laser/ion beam real-time fabrication machines. The consensus of the workshop was that the economic implications of in situ processing are accelerating strongly, particularly for smaller countries(or even larger ones) where the costs of traditional semiconductor factories are growing at unacceptable rates. This problem and the potential solutions were the central themes of the conference. The talks by Larrabee, Saraswat and Prabhakar pointed to the need for future factories that are smaller and use flexible intelligent manufacturing. In semiconductor device manufacturing, in particular, smaller lots, cluster tools (i.e. in-situ processing), and tight process control will result in better contamination control and lower cost. The other talks of the conference provided specified examples of advances in in-situ processing that will contribute to making this vision of intelligent flexible manufacturing a reality.


Descriptors :   *MANUFACTURING , *THIN FILMS , *SEMICONDUCTORS , *LASER APPLICATIONS , *SEMICONDUCTOR DEVICES , *INDUSTRIAL ENGINEERING , ORGANIZATIONS , COST EFFECTIVENESS , MACHINING , LASER BEAMS , LITHOGRAPHY , WORKSHOPS , CERAMIC MATERIALS , ION BEAMS , INTEGRATED CIRCUITS , FABRICATION , TOOLS , PROCESSING , PLASMAS(PHYSICS)


Subject Categories : Electrical and Electronic Equipment
      Lasers and Masers
      Mfg & Industrial Eng & Control of Product Sys
      Printing and Graphic Arts
      Plasma Physics and Magnetohydrodynamics


Distribution Statement : APPROVED FOR PUBLIC RELEASE