Accession Number : ADA255897


Title :   Temperature Measurements with Micrometer Spatial Resolution


Descriptive Note : Technical rept.,


Corporate Author : AEROSPACE CORP EL SEGUNDO CA ENGINEERING AND TECHNOLOGY GROUP


Personal Author(s) : Izaguirre, Francisco ; Csanky, Geza ; Hawkins, Gary F


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/a255897.pdf


Report Date : 24 Jul 1992


Pagination or Media Count : 20


Abstract : A novel technique has been developed to measure temperatures with a spatial resolution less than 10 micron. This method uses the temperature- sensitive time decay fluorescence of a phosphor as a surface sensor. The spatial resolution is obtained by using an electron beam to excite individual phosphor grains deposited on the surface of interest. The phosphor selected for its dynamic range and chemical stability is the inorganic compound magnesium fluorogermanate activated with manganese. The time decay constant of its fluorescence decreases monotonically with temperature between -200 to 450 deg C. This method was verified on a cross-sectioned Zener diode. A description of the technique and a temperature map of the sectioned area of an operating diode are presented.


Descriptors :   *TEMPERATURE , *SEMICONDUCTORS , *AVALANCHE DIODES , DIODES , STABILITY , CHEMICALS , SURFACES , ELECTRON BEAMS , MAPS , DECAY , PHOSPHORS , MANGANESE , INORGANIC COMPOUNDS , DYNAMIC RANGE , JUNCTIONS , CONSTANTS , ELECTRONS , RESOLUTION , DYNAMICS , FLUORESCENCE , MAGNESIUM


Subject Categories : Electrical and Electronic Equipment


Distribution Statement : APPROVED FOR PUBLIC RELEASE