Accession Number : ADA254162


Title :   Advanced Processing and Characterization Technologies. Fabrication and Characterization of Semiconductor Optoelectronic Devices and Integrated Circuits Held in Clearwater, Florida on 8-10 May 1991. American Vacuum Society Series 10


Descriptive Note : Conference proceedings no. 10 (Final) 8 Apr 1991-7 Apr 1992,


Corporate Author : FLORIDA UNIV GAINESVILLE


Personal Author(s) : Holloway, Paul H


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/a254162.pdf


Report Date : Jul 1992


Pagination or Media Count : 236


Abstract : The Topics include: Focused-Ion-Beam Micromachining: A Fabrication Tool for Prototypal Semiconductor Lasers; A Novel Vacuum Lithography with SiN(x) Resist by Focused Ion Beam Exposure and Dry Etching Development; ECR Plasma Etching of III-V Optoelectronic Devices; Influence of SiCl4 Reactive Ion Etching on the Electrical Characteristics of GaAs; Electron-beam Writing System for Holographic Optical Elements; Micro Dry Etching Process for Vertical Cavity Surface Emitting Lasers; Sulfide Treatment on III-V Compound Surfaces; Sulfur Passivation of GaAs Surfaces; Direct Observation of GaAs Surface Cleaning Process Under Hydrogen Radical Beam Irradiation; Near Surface Type Conversion of p-type, Single Crystal InP by Plasma Exposure; Advances in Controlling Electrical Contacts for Optoelectronics; Indium Ohmic Contacts to n-ZnSe; A New Method of Zn Diffusion into InP for Optical Device Fabrication; Open Tube Double Diffusion for the Fabrication of Bipolar Transistor Waveguide Optical Switch; and Full-Water Technology for Laser Fabrication and Testing.


Descriptors :   *OPTICAL EQUIPMENT , *ELECTRONIC EQUIPMENT , *SEMICONDUCTORS , SYMPOSIA , PROCESSING , INTEGRATED CIRCUITS , SURFACES , HOLOGRAPHY , DIFFUSION , ETCHED CRYSTALS , OPTICAL SWITCHING , INDIUM PHOSPHIDES , ZINC , LITHOGRAPHY , LASERS , ION BEAMS , SINGLE CRYSTALS , GALLIUM ARSENIDES , VACUUM


Subject Categories : Inorganic Chemistry
      Electrical and Electronic Equipment
      Electrooptical and Optoelectronic Devices


Distribution Statement : APPROVED FOR PUBLIC RELEASE