Accession Number : ADA226438


Title :   Submicron Structures and Various Technology


Descriptive Note : Progress rept.


Corporate Author : MASSACHUSETTS INST OF TECH CAMBRIDGE RESEARCH LAB OF ELECTRONICS


Personal Author(s) : Allen, Jonathan ; Kleppner, Daniel ; Smith, Henry I ; Thompson, Carl V ; Ceyer, Sylvia T ; Nelson, Keith A ; Kolodziejski, Leslie A


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/a226438.pdf


Report Date : Jun 1990


Pagination or Media Count : 93


Abstract : Work by Prof. J. Allen and his collaborators is summarized here. Document complete per ARO. Submicron Structures Technology and Research. Microstructural Evolution in Thin Films of Electronic Materials. Chemical Reaction Dynamics at Surfaces. Measurement of Electron-phonon interactions through large-amplitude phonon excitation. Chemical beam epitaxy of compound semiconductors.


Descriptors :   *ELECTRONICS , SEMICONDUCTORS


Subject Categories : Solid State Physics


Distribution Statement : APPROVED FOR PUBLIC RELEASE