Accession Number : ADA113148

Title :   Silver-Doping Effects and Photostructural Transformation in Evaporated AS2S3 Thin Films.

Descriptive Note : Final rept.,


Personal Author(s) : Chen,Teh-Yi James ; Zemel,Jay N ; Lauks,Imant

Full Text :

Report Date : 16 Feb 1982

Pagination or Media Count : 220

Abstract : In this dissertation, one of the promising inorganic materials, the evaporated As2S3 film, is examined and their applications in microfabrications under the use of X-ray and electron-beam to induce the chemical responses are studied in Chapter 2. The compatabilities of As2S3 inorganic resists with advanced microfabrication processes, such as plasma etching, are studied in Chapter 3. In Chapter 4, the structural transformation of the As2S3 film upon band-gap illumination is examined. Work on the structural, optical and chemical properties of amorphous As2S3 films subjected to silver injection process by the electrochemical method will be studied in Chapter 5.

Descriptors :   *Electrochemistry , *Silver , *Doping , *Thin films , *Evaporation , Processing , Fabrication , Etching , Plasmas(Physics) , Microminiaturization , Structures , Transformations , Energy bands , Energy gaps , Arsenic compounds , Illumination , Inorganic materials , Injection

Subject Categories : Physical Chemistry
      Fabrication Metallurgy

Distribution Statement : APPROVED FOR PUBLIC RELEASE