Accession Number : AD1050685

Title :   Chip-Scale, Ultra-Sensitive Opto-Mechanical Acceleration and Force Sensors

Descriptive Note : Technical Report,01 Jul 2011,31 Dec 2016

Corporate Author : California Institute of Technology Pasadena United States

Personal Author(s) : Painter, Oskar J

Full Text :

Report Date : 01 Dec 2017

Pagination or Media Count : 61

Abstract : Our efforts within the DARPA/ARO QuASAR program are focused on developing chip-scale optomechanical (OM) inertial sensors. Our approach involves the use of nanoscale photonic crystal optical resonators for sensitive optical read-out of mechanical motion, and nanoscale tethers for low-mechanical-dissipation anchoring of the mechanical proof mass. Our primary program goal was to develop an optomechanical accelerometer with bandwidth of 10kHz and noise equivalent acceleration (NEA) less than 100 nano-gee/sqrt(Hz) [gee=10m/s2]. We also explored the realization of OM gyros based upon similar optomechanical structures.

Descriptors :   microelectromechanical systems , self assembled monolayers , refractive index , quantum wells , laser diodes , electronics laboratories , silicon compounds , photonic crystals , optical images , electron beam lithography , fabrication , ceramic materials , bandwidth , DETECTORS

Subject Categories : Electrooptical and Optoelectronic Devices

Distribution Statement : APPROVED FOR PUBLIC RELEASE