Accession Number : AD1041981


Title :   Effects on Ferroelectric Thin-Film Stacks and Devices for Piezoelectric MEMS Applications at Varied Total Ionizing Dose (TID)


Descriptive Note : Conference Paper


Corporate Author : U.S. Army Research Laboratory Adelphi United States


Personal Author(s) : Rivas,Manuel ; Brewer,Steven J ; Callaway,Conrad ; Zhou,Hanhan ; Rudy,Ryan Q ; Glaser,Evan R ; Cress,Cory D ; Guerrier,Jonathan E ; Jones,Jacob L ; Bassiri-Gharb,Nazanin ; Polcawich,Ronald G


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/1041981.pdf


Report Date : 01 Mar 2017


Pagination or Media Count : 4


Abstract : Lead zirconate titanate (PZT) based thin films play a key role in a wide variety of applications due to its ferroelectric, piezoelectric, and pyroelectric properties. This work provides information on the effects of 60Co radiation at different total ionization doses (TID) on theferroelectric, dielectric, and piezoelectric properties of PZT PiezoMEMS actuator devices with two different top electrodes. Overall, the devices with IrO2 top electrode were less impacted by the irradiation compared to the Pt top electrode devices.


Descriptors :   thin films , ferroelectricity , piezoelectricity , lead zirconate titanates , actuators , radiation , gamma rays , ionization , electrodes , polarization , permittivity(electricity) , dielectrics , pyroelectricity


Subject Categories : Electricity and Magnetism


Distribution Statement : APPROVED FOR PUBLIC RELEASE