Accession Number : AD1011570


Title :   Random Surface Texturing of Silicon Dioxide Using Gold Agglomerates


Descriptive Note : Technical Report


Corporate Author : US Army Research Laboratory Adelphi United States


Personal Author(s) : Olver,Kimberley A


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/1011570.pdf


Report Date : 01 Jul 2016


Pagination or Media Count : 16


Abstract : A fabrication process for creating a silicon dioxide (SiO2) light-trapping structure as part of an anti-reflective (AR) coating has been developed. A thin e-beam-deposited gold layer, when deposited onto an oxide surface, will coalesce into an even distribution of irregular agglomerates, also known as complete islanding. By using these gold agglomerations as a metal mask, the SiO2 can be etched using an inductively coupled plasma system. The result is a textured surface structure, which can then be used as a light-trapping top layer in an AR coating on solar cells.


Descriptors :   solar cells , fabrication , silicon dioxide , antireflection coatings , electron beams , agglomerates , semiconductors , electromagnetic radiation


Distribution Statement : APPROVED FOR PUBLIC RELEASE