Accession Number : AD1011570

Title :   Random Surface Texturing of Silicon Dioxide Using Gold Agglomerates

Descriptive Note : Technical Report

Corporate Author : US Army Research Laboratory Adelphi United States

Personal Author(s) : Olver,Kimberley A

Full Text :

Report Date : 01 Jul 2016

Pagination or Media Count : 16

Abstract : A fabrication process for creating a silicon dioxide (SiO2) light-trapping structure as part of an anti-reflective (AR) coating has been developed. A thin e-beam-deposited gold layer, when deposited onto an oxide surface, will coalesce into an even distribution of irregular agglomerates, also known as complete islanding. By using these gold agglomerations as a metal mask, the SiO2 can be etched using an inductively coupled plasma system. The result is a textured surface structure, which can then be used as a light-trapping top layer in an AR coating on solar cells.

Descriptors :   solar cells , fabrication , silicon dioxide , antireflection coatings , electron beams , agglomerates , semiconductors , electromagnetic radiation

Distribution Statement : APPROVED FOR PUBLIC RELEASE