Accession Number : AD1006150

Title :   MEMS Gate Structures for Electric Propulsion Applications

Descriptive Note : Conference Paper

Corporate Author : University of Michigan Ann Arbor United States

Personal Author(s) : Liu,Thomas M ; Morris,David P ; Cionca,Codrin N ; Gallimore,Alec D ; Gilchrist,Brian E ; Clarke,Roy

Full Text :

Report Date : 12 Jul 2006

Pagination or Media Count : 11

Abstract : A MEMS gate prototype is under development to extract and accelerate charged particles for use with field emission cathodes and the nanoparticle field extraction thruster at the University of Michigan. Preliminary simulations suggest the desirability of a unity aspect ratio in the emission channel design to achieve electric field uniformity. Low emission threshold cubic boron nitride films have been grown, and gated testing with these films along with carbon nanotubes is in progress.

Descriptors :   MICROELECTROMECHANICAL SYSTEMS , prototypes , ELECTRIC PROPULSION , GATES , FIELD EMISSIOn , cathodes , carbon nanotubes , current density , ASPECT RATIO , fabrication , test and evaluation , boron compounds , nanoparticles , THRUSTERS , electric fields , voltage

Distribution Statement : APPROVED FOR PUBLIC RELEASE