Accession Number : AD0464486


Title :   FABRICATION OF GLASS MASKS, AND THEIR APPLICATION TO THIN-FILM CIRCUIT DEPOSITION


Corporate Author : MITRE CORP BEDFORD MA


Personal Author(s) : Everett, P ; Roderick, R


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/464486.pdf


Report Date : May 1965


Pagination or Media Count : 29


Abstract : This report describes a process which has been developed for the etching of glass masks. A discussion of the requirements for these masks in thin-film circuit deposition precedes a detailed description of the process. Six masks were produced by the process, and measurements were made to determine the tolerances obtained.


Descriptors :   *SEMICONDUCTING FILMS , *TEMPLATES , INTEGRATED CIRCUITS , GLASS , PRECISION FINISHING , PRINTED CIRCUITS , PHOTOENGRAVING , MANUFACTURING , MINIATURE ELECTRONIC EQUIPMENT , RESISTORS , INORGANIC ACIDS , MATERIALS , FLUORIDES


Subject Categories : Solid State Physics


Distribution Statement : APPROVED FOR PUBLIC RELEASE