Accession Number : AD0437399
Title : RESEARCH AND DEVELOPMENT FOR SURFACE PROTECTION OF SEMICONDUCTOR DEVICES.
Descriptive Note : Final rept.,
Corporate Author : MOTOROLA INC PHOENIX ARIZ
Personal Author(s) : Hall,M. A. ; Cooper,H. W. ; Flaschen,S. S.
Report Date : 14 DEC 1963
Pagination or Media Count : 188
Abstract : Effort was concentrated in analyzing, understanding and controlling phenomena at or near semiconductor surfaces so that the level of device technology would be raised. A controlled ambient program, controlling the atmosphere in the package above the semiconductor surface, stabilized and also optimized the electrical parameters of the devices. This was accomplished by controlling the concentration and distribution of water molecules at the surface in the vicinity of the junction. Various glasses, prepared by sputtering and various other means, were used to provide a relatively impermeable barier to intimately seal the surface and junction areas. The electrical qualifications of the glasses also were determined to ensure that they would enhance and protect the devices rather than limit them. The carier state
Descriptors : (*SEMICONDUCTOR DEVICES, SURFACE PROPERTIES), SILICON, OXIDES, GLASS, OXIDATION, TRANSISTORS, CRYSTAL SUBSTRUCTURE, IMPURITIES, MOISTUREPROOFING, RECOMBINATION REACTIONS, TABLES(DATA)
Distribution Statement : APPROVED FOR PUBLIC RELEASE